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Influence of Water on Chemical Vapor Deposition of Ni and Co thin films from ethanol solutions of acetylacetonate precursors

In chemical vapor deposition experiments with pulsed spray evaporation (PSE-CVD) of liquid solutions of Ni and Co acetylacetonate in ethanol as precursors, the influence of water in the feedstock on the composition and growth kinetics of deposited Ni and Co metal films was systematically studied. Va...

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Detalles Bibliográficos
Autores principales: Weiss, Theodor, Zielasek, Volkmar, Bäumer, Marcus
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4677359/
https://www.ncbi.nlm.nih.gov/pubmed/26658547
http://dx.doi.org/10.1038/srep18194