A small-gap electrostatic micro-actuator for large deflections

Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of approximately one third of the electrode separation. Large electrode separation...

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Detalles Bibliográficos
Autores principales: Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4682043/
https://www.ncbi.nlm.nih.gov/pubmed/26655557
http://dx.doi.org/10.1038/ncomms10078

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4682043/
https://www.ncbi.nlm.nih.gov/pubmed/26655557
http://dx.doi.org/10.1038/ncomms10078

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