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Remarkably high mobility ultra-thin-film metal-oxide transistor with strongly overlapped orbitals

High mobility channel thin-film-transistor (TFT) is crucial for both display and future generation integrated circuit. We report a new metal-oxide TFT that has an ultra-thin 4.5 nm SnO(2) thickness for both active channel and source-drain regions, very high 147 cm(2)/Vs field-effect mobility, high I...

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Detalles Bibliográficos
Autores principales: Wei Shih, Chen, Chin, Albert, Fu Lu, Chun, Fang Su, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4705631/
https://www.ncbi.nlm.nih.gov/pubmed/26744240
http://dx.doi.org/10.1038/srep19023

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