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Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides...

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Detalles Bibliográficos
Autores principales:	Zhang, Hao, Xu, Dacheng, Zhang, Xiaoyang, Chen, Qiao, Xie, Huikai, Li, Suiqiong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2015
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4721760/ https://www.ncbi.nlm.nih.gov/pubmed/26690432 http://dx.doi.org/10.3390/s151229840

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