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Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators

This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to t...

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Detalles Bibliográficos
Autores principales:	Ducrot, Pierre-Henri, Dufour, Isabelle, Ayela, Cédric
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4726305/ https://www.ncbi.nlm.nih.gov/pubmed/26792224 http://dx.doi.org/10.1038/srep19426

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