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An Areal Isotropic Spline Filter for Surface Metrology
This paper deals with the application of the spline filter as an areal filter for surface metrology. A profile (2D) filter is often applied in orthogonal directions to yield an areal filter for a three-dimensional (3D) measurement. Unlike the Gaussian filter, the spline filter presents an anisotropi...
Autores principales: | Zhang, Hao, Tong, Mingsi, Chu, Wei |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4730676/ https://www.ncbi.nlm.nih.gov/pubmed/26958439 http://dx.doi.org/10.6028/jres.120.006 |
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