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Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732104/ https://www.ncbi.nlm.nih.gov/pubmed/26751455 http://dx.doi.org/10.3390/s16010071 |
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author | Cao, Huiliang Li, Hongsheng Kou, Zhiwei Shi, Yunbo Tang, Jun Ma, Zongmin Shen, Chong Liu, Jun |
author_facet | Cao, Huiliang Li, Hongsheng Kou, Zhiwei Shi, Yunbo Tang, Jun Ma, Zongmin Shen, Chong Liu, Jun |
author_sort | Cao, Huiliang |
collection | PubMed |
description | This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability. |
format | Online Article Text |
id | pubmed-4732104 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-47321042016-02-12 Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods Cao, Huiliang Li, Hongsheng Kou, Zhiwei Shi, Yunbo Tang, Jun Ma, Zongmin Shen, Chong Liu, Jun Sensors (Basel) Article This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability. MDPI 2016-01-07 /pmc/articles/PMC4732104/ /pubmed/26751455 http://dx.doi.org/10.3390/s16010071 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Cao, Huiliang Li, Hongsheng Kou, Zhiwei Shi, Yunbo Tang, Jun Ma, Zongmin Shen, Chong Liu, Jun Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods |
title | Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods |
title_full | Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods |
title_fullStr | Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods |
title_full_unstemmed | Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods |
title_short | Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods |
title_sort | optimization and experimentation of dual-mass mems gyroscope quadrature error correction methods |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732104/ https://www.ncbi.nlm.nih.gov/pubmed/26751455 http://dx.doi.org/10.3390/s16010071 |
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