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Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods

This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures...

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Autores principales: Cao, Huiliang, Li, Hongsheng, Kou, Zhiwei, Shi, Yunbo, Tang, Jun, Ma, Zongmin, Shen, Chong, Liu, Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732104/
https://www.ncbi.nlm.nih.gov/pubmed/26751455
http://dx.doi.org/10.3390/s16010071
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author Cao, Huiliang
Li, Hongsheng
Kou, Zhiwei
Shi, Yunbo
Tang, Jun
Ma, Zongmin
Shen, Chong
Liu, Jun
author_facet Cao, Huiliang
Li, Hongsheng
Kou, Zhiwei
Shi, Yunbo
Tang, Jun
Ma, Zongmin
Shen, Chong
Liu, Jun
author_sort Cao, Huiliang
collection PubMed
description This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability.
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spelling pubmed-47321042016-02-12 Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods Cao, Huiliang Li, Hongsheng Kou, Zhiwei Shi, Yunbo Tang, Jun Ma, Zongmin Shen, Chong Liu, Jun Sensors (Basel) Article This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability. MDPI 2016-01-07 /pmc/articles/PMC4732104/ /pubmed/26751455 http://dx.doi.org/10.3390/s16010071 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Cao, Huiliang
Li, Hongsheng
Kou, Zhiwei
Shi, Yunbo
Tang, Jun
Ma, Zongmin
Shen, Chong
Liu, Jun
Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
title Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
title_full Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
title_fullStr Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
title_full_unstemmed Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
title_short Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
title_sort optimization and experimentation of dual-mass mems gyroscope quadrature error correction methods
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732104/
https://www.ncbi.nlm.nih.gov/pubmed/26751455
http://dx.doi.org/10.3390/s16010071
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