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Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity
An investigation of a segmented annular coplanar capacitor is presented. We focus on its theoretical model, and a mathematical expression of the capacitance value is derived by solving a Laplace equation with Hankel transform. The finite element method is employed to verify the analytical result. Di...
Autores principales: | Guo, Jiahao, Hu, Pengcheng, Tan, Jiubin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4732166/ https://www.ncbi.nlm.nih.gov/pubmed/26805844 http://dx.doi.org/10.3390/s16010133 |
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