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Direct growth of single-crystalline III–V semiconductors on amorphous substrates

The III–V compound semiconductors exhibit superb electronic and optoelectronic properties. Traditionally, closely lattice-matched epitaxial substrates have been required for the growth of high-quality single-crystal III–V thin films and patterned microstructures. To remove this materials constraint,...

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Detalles Bibliográficos
Autores principales: Chen, Kevin, Kapadia, Rehan, Harker, Audrey, Desai, Sujay, Seuk Kang, Jeong, Chuang, Steven, Tosun, Mahmut, Sutter-Fella, Carolin M., Tsang, Michael, Zeng, Yuping, Kiriya, Daisuke, Hazra, Jubin, Madhvapathy, Surabhi Rao, Hettick, Mark, Chen, Yu-Ze, Mastandrea, James, Amani, Matin, Cabrini, Stefano, Chueh, Yu-Lun, Ager III, Joel W., Chrzan, Daryl C., Javey, Ali
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4737854/
https://www.ncbi.nlm.nih.gov/pubmed/26813257
http://dx.doi.org/10.1038/ncomms10502
Descripción
Sumario:The III–V compound semiconductors exhibit superb electronic and optoelectronic properties. Traditionally, closely lattice-matched epitaxial substrates have been required for the growth of high-quality single-crystal III–V thin films and patterned microstructures. To remove this materials constraint, here we introduce a growth mode that enables direct writing of single-crystalline III–V's on amorphous substrates, thus further expanding their utility for various applications. The process utilizes templated liquid-phase crystal growth that results in user-tunable, patterned micro and nanostructures of single-crystalline III–V's of up to tens of micrometres in lateral dimensions. InP is chosen as a model material system owing to its technological importance. The patterned InP single crystals are configured as high-performance transistors and photodetectors directly on amorphous SiO(2) growth substrates, with performance matching state-of-the-art epitaxially grown devices. The work presents an important advance towards universal integration of III–V's on application-specific substrates by direct growth.