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Direct Determination of 3D Distribution of Elemental Composition in Single Semiconductor Nanoislands by Scanning Auger Microscopy

An application of scanning Auger microscopy with ion etching technique and effective compensation of thermal drift of the surface analyzed area is proposed for direct local study of composition distribution in the bulk of single nanoislands. For Ge(x)Si(1 − x)-nanoislands obtained by MBE of Ge on Si...

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Detalles Bibliográficos
Autores principales:	Ponomaryov, Semyon S., Yukhymchuk, Volodymyr O., Lytvyn, Peter M., Valakh, Mykhailo Ya
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2016
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4766170/ https://www.ncbi.nlm.nih.gov/pubmed/26909783 http://dx.doi.org/10.1186/s11671-016-1308-x

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