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Fabrication and Photoluminescence Study of Large-Area Ordered and Size-Controlled GeSi Multi-quantum-well Nanopillar Arrays

Large-area ordered GeSi multi-quantum-well nanopillar array (MQW-NPA) samples with different nanopillar lateral sizes (270, 120, and 70 nm) are fabricated by a cost-effective and scalable dry-etching process in combination with nanosphere lithography technique. A significant enhancement in photolumi...

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Detalles Bibliográficos
Autores principales: Jiang, Yuwen, Huang, Shufan, Zhu, Zhichao, Zeng, Cheng, Fan, Yongliang, Jiang, Zuimin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4766177/
https://www.ncbi.nlm.nih.gov/pubmed/26909782
http://dx.doi.org/10.1186/s11671-016-1312-1