In-situ Observation of Cross-Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

Load-displacement curves measured during indentation experiments on thin films depend on non-homogeneous intrinsic film microstructure and residual stress gradients as well as on their changes during indenter penetration into the material. To date, microstructural changes and local stress concentrat...

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Detalles Bibliográficos
Autores principales: Zeilinger, Angelika, Todt, Juraj, Krywka, Christina, Müller, Martin, Ecker, Werner, Sartory, Bernhard, Meindlhumer, Michael, Stefenelli, Mario, Daniel, Rostislav, Mitterer, Christian, Keckes, Jozef
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4780078/
https://www.ncbi.nlm.nih.gov/pubmed/26947558
http://dx.doi.org/10.1038/srep22670

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4780078/
https://www.ncbi.nlm.nih.gov/pubmed/26947558
http://dx.doi.org/10.1038/srep22670

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