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High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography
[Image: see text] We combine atomic layer lithography and glancing-angle ion polishing to create wafer-scale metamaterials composed of dense arrays of ultrasmall coaxial nanocavities in gold films. This new fabrication scheme makes it possible to shrink the diameter and increase the packing density...
Autores principales: | Yoo, Daehan, Nguyen, Ngoc-Cuong, Martin-Moreno, Luis, Mohr, Daniel A., Carretero-Palacios, Sol, Shaver, Jonah, Peraire, Jaime, Ebbesen, Thomas W., Oh, Sang-Hyun |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2016
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4789754/ https://www.ncbi.nlm.nih.gov/pubmed/26910363 http://dx.doi.org/10.1021/acs.nanolett.6b00024 |
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