A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency

For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper. In order to weaken the dependency, a novel structure...

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Detalles Bibliográficos
Autores principales: Xu, Yu, Zhao, Libo, Jiang, Zhuangde, Ding, Jianjun, Peng, Niancai, Zhao, Yulong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801586/
https://www.ncbi.nlm.nih.gov/pubmed/26861343
http://dx.doi.org/10.3390/s16020210

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4801586/
https://www.ncbi.nlm.nih.gov/pubmed/26861343
http://dx.doi.org/10.3390/s16020210

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