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The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures

We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital...

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Detalles Bibliográficos
Autores principales:	Shu, Lin, Peng, Bin, Li, Chuan, Gong, Dongdong, Yang, Zhengbing, Liu, Xingzhao, Zhang, Wanli
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4851040/ https://www.ncbi.nlm.nih.gov/pubmed/27077864 http://dx.doi.org/10.3390/s16040526

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