Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

A multi-repeated photolithography method for manufacturing an incremental linear scale using projection lithography is presented. The method is based on the average homogenization effect that periodically superposes the light intensity of different locations of pitches in the mask to make a consiste...

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Detalles Bibliográficos
Autores principales: Ren, Dongxu, Zhao, Huiying, Zhang, Chupeng, Yuan, Daocheng, Xi, Jianpu, Zhu, Xueliang, Ban, Xinxing, Dong, Longchao, Gu, Yawen, Jiang, Chunye
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4851052/
https://www.ncbi.nlm.nih.gov/pubmed/27089348
http://dx.doi.org/10.3390/s16040538

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