Feature Adaptive Sampling for Scanning Electron Microscopy

A new method for the image acquisition in scanning electron microscopy (SEM) was introduced. The method used adaptively increased pixel-dwell times to improve the signal-to-noise ratio (SNR) in areas of high detail. In areas of low detail, the electron dose was reduced on a per pixel basis, and a-po...

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Detalles Bibliográficos
Autores principales: Dahmen, Tim, Engstler, Michael, Pauly, Christoph, Trampert, Patrick, de Jonge, Niels, Mücklich, Frank, Slusallek, Philipp
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4858653/
https://www.ncbi.nlm.nih.gov/pubmed/27150131
http://dx.doi.org/10.1038/srep25350

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