The Microcalorimeter for Industrial Applications

To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain...

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Detalles Bibliográficos
Autores principales: Redfern, Del, Nicolosi, Joe, Höhne, Jens, Weiland, Rainer, Simmnacher, Birgit, Hollerich, Christian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2002
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4863849/
https://www.ncbi.nlm.nih.gov/pubmed/27446756
http://dx.doi.org/10.6028/jres.107.050
Descripción
Sumario:To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain criteria must be addressed. Aspects of resolution, cooling and hold time, count rates as well as vibrations are considered. Data is presented to the present efforts to handle these issues as well as discussing development plans for the future.

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