The Microcalorimeter for Industrial Applications

To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain...

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Detalles Bibliográficos
Autores principales: Redfern, Del, Nicolosi, Joe, Höhne, Jens, Weiland, Rainer, Simmnacher, Birgit, Hollerich, Christian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2002
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4863849/
https://www.ncbi.nlm.nih.gov/pubmed/27446756
http://dx.doi.org/10.6028/jres.107.050

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