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Feasibility demonstration of a massively parallelizable optical near-field sensor for sub-wavelength defect detection and imaging
To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection bec...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4868971/ https://www.ncbi.nlm.nih.gov/pubmed/27185385 http://dx.doi.org/10.1038/srep26172 |