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Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response
All-dielectric metamaterials offer a potential low-loss alternative to plasmonic metamaterials at optical frequencies. Here, we experimentally demonstrate a silicon based large-scale magnetic metamaterial, which is fabricated with standard photolithography and conventional reactive ion etching proce...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4872140/ https://www.ncbi.nlm.nih.gov/pubmed/27194105 http://dx.doi.org/10.1038/srep25760 |
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author | Yi, Ningbo Sun, Shang Gao, Yisheng Wang, Kaiyang Gu, Zhiyuan Sun, Siwu Song, Qinghai Xiao, Shumin |
author_facet | Yi, Ningbo Sun, Shang Gao, Yisheng Wang, Kaiyang Gu, Zhiyuan Sun, Siwu Song, Qinghai Xiao, Shumin |
author_sort | Yi, Ningbo |
collection | PubMed |
description | All-dielectric metamaterials offer a potential low-loss alternative to plasmonic metamaterials at optical frequencies. Here, we experimentally demonstrate a silicon based large-scale magnetic metamaterial, which is fabricated with standard photolithography and conventional reactive ion etching process. The periodically arrayed silicon sub-wavelength structures possess electric and magnetic responses with low loss in mid-infrared wavelength range. We investigate the electric and magnetic resonances dependencies on the structural parameters and demonstrate the possibility of obtaining strong dielectric-based magnetic resonance through a broad band range. The optical responses are quite uniform over a large area about 2 × 2 cm(2). The scalability of this design and compatibility fabrication method with highly developed semiconductor devices process could lead to new avenues of manipulating light for low-loss, large-area and real integrated photonic applications. |
format | Online Article Text |
id | pubmed-4872140 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | Nature Publishing Group |
record_format | MEDLINE/PubMed |
spelling | pubmed-48721402016-06-01 Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response Yi, Ningbo Sun, Shang Gao, Yisheng Wang, Kaiyang Gu, Zhiyuan Sun, Siwu Song, Qinghai Xiao, Shumin Sci Rep Article All-dielectric metamaterials offer a potential low-loss alternative to plasmonic metamaterials at optical frequencies. Here, we experimentally demonstrate a silicon based large-scale magnetic metamaterial, which is fabricated with standard photolithography and conventional reactive ion etching process. The periodically arrayed silicon sub-wavelength structures possess electric and magnetic responses with low loss in mid-infrared wavelength range. We investigate the electric and magnetic resonances dependencies on the structural parameters and demonstrate the possibility of obtaining strong dielectric-based magnetic resonance through a broad band range. The optical responses are quite uniform over a large area about 2 × 2 cm(2). The scalability of this design and compatibility fabrication method with highly developed semiconductor devices process could lead to new avenues of manipulating light for low-loss, large-area and real integrated photonic applications. Nature Publishing Group 2016-05-19 /pmc/articles/PMC4872140/ /pubmed/27194105 http://dx.doi.org/10.1038/srep25760 Text en Copyright © 2016, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ |
spellingShingle | Article Yi, Ningbo Sun, Shang Gao, Yisheng Wang, Kaiyang Gu, Zhiyuan Sun, Siwu Song, Qinghai Xiao, Shumin Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response |
title | Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response |
title_full | Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response |
title_fullStr | Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response |
title_full_unstemmed | Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response |
title_short | Large-Scale and Defect-Free Silicon Metamaterials with Magnetic Response |
title_sort | large-scale and defect-free silicon metamaterials with magnetic response |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4872140/ https://www.ncbi.nlm.nih.gov/pubmed/27194105 http://dx.doi.org/10.1038/srep25760 |
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