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Measuring Micro-Friction Torque in MEMS Gas Bearings
An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. Wit...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883417/ https://www.ncbi.nlm.nih.gov/pubmed/27213377 http://dx.doi.org/10.3390/s16050726 |