One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell

A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed...

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Detalles Bibliográficos
Autores principales: Govindan, T. R., Meyyappan, M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887233/
https://www.ncbi.nlm.nih.gov/pubmed/29151755
http://dx.doi.org/10.6028/jres.100.035
_version_ 1782434708536164352
author Govindan, T. R.
Meyyappan, M.
author_facet Govindan, T. R.
Meyyappan, M.
author_sort Govindan, T. R.
collection PubMed
description A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce several critical discharge features observed experimentally.
format Online
Article
Text
id pubmed-4887233
institution National Center for Biotechnology Information
language English
publishDate 1995
publisher [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
record_format MEDLINE/PubMed
spelling pubmed-48872332017-11-17 One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell Govindan, T. R. Meyyappan, M. J Res Natl Inst Stand Technol Article A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce several critical discharge features observed experimentally. [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995 /pmc/articles/PMC4887233/ /pubmed/29151755 http://dx.doi.org/10.6028/jres.100.035 Text en https://creativecommons.org/publicdomain/zero/1.0/ The Journal of Research of the National Institute of Standards and Technology is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.
spellingShingle Article
Govindan, T. R.
Meyyappan, M.
One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
title One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
title_full One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
title_fullStr One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
title_full_unstemmed One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
title_short One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
title_sort one-dimensional modeling studies of the gaseous electronics conference rf reference cell
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887233/
https://www.ncbi.nlm.nih.gov/pubmed/29151755
http://dx.doi.org/10.6028/jres.100.035
work_keys_str_mv AT govindantr onedimensionalmodelingstudiesofthegaseouselectronicsconferencerfreferencecell
AT meyyappanm onedimensionalmodelingstudiesofthegaseouselectronicsconferencerfreferencecell

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