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One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell
A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1995
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887233/ https://www.ncbi.nlm.nih.gov/pubmed/29151755 http://dx.doi.org/10.6028/jres.100.035 |