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Langmuir Probe Measurements in the Gaseous Electronics Conference RF Reference Cell
The use of a Langmuir probe system in two GEC cells is reviewed. The major problems associated with probe diagnostics in a GEC cell are outlined and discussed. While the data base is still insufficient to give definitive values for many parameters, a number of standard measurements are put forward....
Autor principal: | Hopkins, M. B. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1995
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887235/ https://www.ncbi.nlm.nih.gov/pubmed/29151751 http://dx.doi.org/10.6028/jres.100.031 |
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