Optical Calibration of a Submicrometer Magnification Standard

The calibration of a new submicrometer magnification standard for electron microscopes is described. The new standard is based on the width of a thin thermal-oxide film sandwiched between a silicon single-crystal substrate and a polysilicon capping layer. The calibration is based on an ellipsometric...

Descripción completa

Detalles Bibliográficos
Autores principales: Geist, Jon, Belzer, Barbara, Miller, Mary Lou, Roitman, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1992
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4914234/
https://www.ncbi.nlm.nih.gov/pubmed/28053432
http://dx.doi.org/10.6028/jres.097.008

Ejemplares similares

Ejemplares similares