Cargando…
Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric
In the past few decades, gate insulators with a high dielectric constant (high-k dielectric) enabling a physically thick but dielectrically thin insulating layer, have been used to replace traditional SiO(x) insulator and to ensure continuous downscaling of Si-based transistor technology. However, d...
Autores principales: | , , , , , , , , , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4915203/ https://www.ncbi.nlm.nih.gov/pubmed/27325155 http://dx.doi.org/10.1038/srep28326 |
_version_ | 1782438666712383488 |
---|---|
author | Tsai, Shu-Ju Wang, Chiang-Lun Lee, Hung-Chun Lin, Chun-Yeh Chen, Jhih-Wei Shiu, Hong-Wei Chang, Lo-Yueh Hsueh, Han-Ting Chen, Hung-Ying Tsai, Jyun-Yu Lu, Ying-Hsin Chang, Ting-Chang Tu, Li-Wei Teng, Hsisheng Chen, Yi-Chun Chen, Chia-Hao Wu, Chung-Lin |
author_facet | Tsai, Shu-Ju Wang, Chiang-Lun Lee, Hung-Chun Lin, Chun-Yeh Chen, Jhih-Wei Shiu, Hong-Wei Chang, Lo-Yueh Hsueh, Han-Ting Chen, Hung-Ying Tsai, Jyun-Yu Lu, Ying-Hsin Chang, Ting-Chang Tu, Li-Wei Teng, Hsisheng Chen, Yi-Chun Chen, Chia-Hao Wu, Chung-Lin |
author_sort | Tsai, Shu-Ju |
collection | PubMed |
description | In the past few decades, gate insulators with a high dielectric constant (high-k dielectric) enabling a physically thick but dielectrically thin insulating layer, have been used to replace traditional SiO(x) insulator and to ensure continuous downscaling of Si-based transistor technology. However, due to the non-silicon derivative natures of the high-k metal oxides, transport properties in these dielectrics are still limited by various structural defects on the hetero-interfaces and inside the dielectrics. Here, we show that another insulating silicon compound, amorphous silicon nitride (a-Si(3)N(4)), is a promising candidate of effective electrical insulator for use as a high-k dielectric. We have examined a-Si(3)N(4) deposited using the plasma-assisted atomic beam deposition (PA-ABD) technique in an ultra-high vacuum (UHV) environment and demonstrated the absence of defect-related luminescence; it was also found that the electronic structure across the a-Si(3)N(4)/Si heterojunction approaches the intrinsic limit, which exhibits large band gap energy and valence band offset. We demonstrate that charge transport properties in the metal/a-Si(3)N(4)/Si (MNS) structures approach defect-free limits with a large breakdown field and a low leakage current. Using PA-ABD, our results suggest a general strategy to markedly improve the performance of gate dielectric using a nearly defect-free insulator. |
format | Online Article Text |
id | pubmed-4915203 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | Nature Publishing Group |
record_format | MEDLINE/PubMed |
spelling | pubmed-49152032016-06-27 Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric Tsai, Shu-Ju Wang, Chiang-Lun Lee, Hung-Chun Lin, Chun-Yeh Chen, Jhih-Wei Shiu, Hong-Wei Chang, Lo-Yueh Hsueh, Han-Ting Chen, Hung-Ying Tsai, Jyun-Yu Lu, Ying-Hsin Chang, Ting-Chang Tu, Li-Wei Teng, Hsisheng Chen, Yi-Chun Chen, Chia-Hao Wu, Chung-Lin Sci Rep Article In the past few decades, gate insulators with a high dielectric constant (high-k dielectric) enabling a physically thick but dielectrically thin insulating layer, have been used to replace traditional SiO(x) insulator and to ensure continuous downscaling of Si-based transistor technology. However, due to the non-silicon derivative natures of the high-k metal oxides, transport properties in these dielectrics are still limited by various structural defects on the hetero-interfaces and inside the dielectrics. Here, we show that another insulating silicon compound, amorphous silicon nitride (a-Si(3)N(4)), is a promising candidate of effective electrical insulator for use as a high-k dielectric. We have examined a-Si(3)N(4) deposited using the plasma-assisted atomic beam deposition (PA-ABD) technique in an ultra-high vacuum (UHV) environment and demonstrated the absence of defect-related luminescence; it was also found that the electronic structure across the a-Si(3)N(4)/Si heterojunction approaches the intrinsic limit, which exhibits large band gap energy and valence band offset. We demonstrate that charge transport properties in the metal/a-Si(3)N(4)/Si (MNS) structures approach defect-free limits with a large breakdown field and a low leakage current. Using PA-ABD, our results suggest a general strategy to markedly improve the performance of gate dielectric using a nearly defect-free insulator. Nature Publishing Group 2016-06-21 /pmc/articles/PMC4915203/ /pubmed/27325155 http://dx.doi.org/10.1038/srep28326 Text en Copyright © 2016, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ |
spellingShingle | Article Tsai, Shu-Ju Wang, Chiang-Lun Lee, Hung-Chun Lin, Chun-Yeh Chen, Jhih-Wei Shiu, Hong-Wei Chang, Lo-Yueh Hsueh, Han-Ting Chen, Hung-Ying Tsai, Jyun-Yu Lu, Ying-Hsin Chang, Ting-Chang Tu, Li-Wei Teng, Hsisheng Chen, Yi-Chun Chen, Chia-Hao Wu, Chung-Lin Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric |
title | Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric |
title_full | Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric |
title_fullStr | Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric |
title_full_unstemmed | Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric |
title_short | Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric |
title_sort | approaching defect-free amorphous silicon nitride by plasma-assisted atomic beam deposition for high performance gate dielectric |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4915203/ https://www.ncbi.nlm.nih.gov/pubmed/27325155 http://dx.doi.org/10.1038/srep28326 |
work_keys_str_mv | AT tsaishuju approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT wangchianglun approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT leehungchun approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT linchunyeh approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT chenjhihwei approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT shiuhongwei approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT changloyueh approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT hsuehhanting approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT chenhungying approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT tsaijyunyu approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT luyinghsin approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT changtingchang approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT tuliwei approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT tenghsisheng approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT chenyichun approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT chenchiahao approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric AT wuchunglin approachingdefectfreeamorphoussiliconnitridebyplasmaassistedatomicbeamdepositionforhighperformancegatedielectric |