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High-Hall-Mobility Al-Doped ZnO Films Having Textured Polycrystalline Structure with a Well-Defined (0001) Orientation

Five hundred-nanometer-thick ZnO-based textured polycrystalline films consisting of 490-nm-thick Al-doped ZnO (AZO) films deposited on 10-nm-thick Ga-doped ZnO (GZO) films exhibited a high Hall mobility (μ(H)) of 50.1 cm(2)/Vs with a carrier concentration (N) of 2.55 × 10(20) cm(−3). Firstly, the GZ...

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Detalles Bibliográficos
Autores principales: Nomoto, Junichi, Makino, Hisao, Yamamoto, Tetsuya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4929117/
https://www.ncbi.nlm.nih.gov/pubmed/27365000
http://dx.doi.org/10.1186/s11671-016-1535-1