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High-Hall-Mobility Al-Doped ZnO Films Having Textured Polycrystalline Structure with a Well-Defined (0001) Orientation
Five hundred-nanometer-thick ZnO-based textured polycrystalline films consisting of 490-nm-thick Al-doped ZnO (AZO) films deposited on 10-nm-thick Ga-doped ZnO (GZO) films exhibited a high Hall mobility (μ(H)) of 50.1 cm(2)/Vs with a carrier concentration (N) of 2.55 × 10(20) cm(−3). Firstly, the GZ...
Autores principales: | Nomoto, Junichi, Makino, Hisao, Yamamoto, Tetsuya |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4929117/ https://www.ncbi.nlm.nih.gov/pubmed/27365000 http://dx.doi.org/10.1186/s11671-016-1535-1 |
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