Hard X-Ray Microscope With Submicrometer Spatial Resolution

A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6 µm in width, and resolving line pairs 1.2-µm wide and 1.2-µm apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resol...

Descripción completa

Detalles Bibliográficos
Autores principales: Kuriyama, Masao, Dobbyn, Ronald C., Spal, Richard D., Burdette, Harold E., Black, David R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1990
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4930020/
https://www.ncbi.nlm.nih.gov/pubmed/28179792
http://dx.doi.org/10.6028/jres.095.044
Descripción
Sumario:A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6 µm in width, and resolving line pairs 1.2-µm wide and 1.2-µm apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resolution. Principles of x-ray image magnification are discussed based on x-ray optics and diffraction physics. Examples of applications are shown in microradiography with fiber reinforced composite materials (SiC in Ti(3)Al Nb) and in diffraction imaging (topography) with device patterns on a silicon single crystal. High-resolution tomography has now become a reality.

Ejemplares similares