A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were compl...

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Detalles Bibliográficos
Autores principales: Zhao, Libo, Hu, Yingjie, Wang, Tongdong, Ding, Jianjun, Liu, Xixiang, Zhao, Yulong, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934256/
https://www.ncbi.nlm.nih.gov/pubmed/27275823
http://dx.doi.org/10.3390/s16060830

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934256/
https://www.ncbi.nlm.nih.gov/pubmed/27275823
http://dx.doi.org/10.3390/s16060830

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