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Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings
Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabricati...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970126/ https://www.ncbi.nlm.nih.gov/pubmed/27420070 http://dx.doi.org/10.3390/s16071080 |