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Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch du...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970188/ https://www.ncbi.nlm.nih.gov/pubmed/27455272 http://dx.doi.org/10.3390/s16071146 |
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author | Guan, Yanwei Gao, Shiqiao Liu, Haipeng Jin, Lei Zhang, Yaping |
author_facet | Guan, Yanwei Gao, Shiqiao Liu, Haipeng Jin, Lei Zhang, Yaping |
author_sort | Guan, Yanwei |
collection | PubMed |
description | In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness mismatch is proportional to the output induced by the external linear vibration from the sense direction in the anti-phase mode frequency. In order to verify the proposed stiffness match method, a tuning fork gyroscope (TFG) with the stiffness match electrodes is designed and implemented using the micromachining technology and the experimental study is carried out. The experimental tests illustrate that the vibration output can be reduced by 73.8% through the stiffness match method than the structure without the stiffness match. Therefore, the proposed stiffness match method is experimentally validated to be applicable to vibration sensitivity reduction in the Micro-Electro-Mechanical-Systems (MEMS) tuning fork gyroscopes without sacrificing the scale factor. |
format | Online Article Text |
id | pubmed-4970188 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-49701882016-08-04 Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect Guan, Yanwei Gao, Shiqiao Liu, Haipeng Jin, Lei Zhang, Yaping Sensors (Basel) Article In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness mismatch is proportional to the output induced by the external linear vibration from the sense direction in the anti-phase mode frequency. In order to verify the proposed stiffness match method, a tuning fork gyroscope (TFG) with the stiffness match electrodes is designed and implemented using the micromachining technology and the experimental study is carried out. The experimental tests illustrate that the vibration output can be reduced by 73.8% through the stiffness match method than the structure without the stiffness match. Therefore, the proposed stiffness match method is experimentally validated to be applicable to vibration sensitivity reduction in the Micro-Electro-Mechanical-Systems (MEMS) tuning fork gyroscopes without sacrificing the scale factor. MDPI 2016-07-22 /pmc/articles/PMC4970188/ /pubmed/27455272 http://dx.doi.org/10.3390/s16071146 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Guan, Yanwei Gao, Shiqiao Liu, Haipeng Jin, Lei Zhang, Yaping Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect |
title | Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect |
title_full | Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect |
title_fullStr | Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect |
title_full_unstemmed | Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect |
title_short | Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect |
title_sort | vibration sensitivity reduction of micromachined tuning fork gyroscopes through stiffness match method with negative electrostatic spring effect |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970188/ https://www.ncbi.nlm.nih.gov/pubmed/27455272 http://dx.doi.org/10.3390/s16071146 |
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