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Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch du...

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Detalles Bibliográficos
Autores principales: Guan, Yanwei, Gao, Shiqiao, Liu, Haipeng, Jin, Lei, Zhang, Yaping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970188/
https://www.ncbi.nlm.nih.gov/pubmed/27455272
http://dx.doi.org/10.3390/s16071146
_version_ 1782445931968331776
author Guan, Yanwei
Gao, Shiqiao
Liu, Haipeng
Jin, Lei
Zhang, Yaping
author_facet Guan, Yanwei
Gao, Shiqiao
Liu, Haipeng
Jin, Lei
Zhang, Yaping
author_sort Guan, Yanwei
collection PubMed
description In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness mismatch is proportional to the output induced by the external linear vibration from the sense direction in the anti-phase mode frequency. In order to verify the proposed stiffness match method, a tuning fork gyroscope (TFG) with the stiffness match electrodes is designed and implemented using the micromachining technology and the experimental study is carried out. The experimental tests illustrate that the vibration output can be reduced by 73.8% through the stiffness match method than the structure without the stiffness match. Therefore, the proposed stiffness match method is experimentally validated to be applicable to vibration sensitivity reduction in the Micro-Electro-Mechanical-Systems (MEMS) tuning fork gyroscopes without sacrificing the scale factor.
format Online
Article
Text
id pubmed-4970188
institution National Center for Biotechnology Information
language English
publishDate 2016
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-49701882016-08-04 Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect Guan, Yanwei Gao, Shiqiao Liu, Haipeng Jin, Lei Zhang, Yaping Sensors (Basel) Article In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch due to the fabrication imperfections. The analytical solutions demonstrate that the stiffness mismatch is proportional to the output induced by the external linear vibration from the sense direction in the anti-phase mode frequency. In order to verify the proposed stiffness match method, a tuning fork gyroscope (TFG) with the stiffness match electrodes is designed and implemented using the micromachining technology and the experimental study is carried out. The experimental tests illustrate that the vibration output can be reduced by 73.8% through the stiffness match method than the structure without the stiffness match. Therefore, the proposed stiffness match method is experimentally validated to be applicable to vibration sensitivity reduction in the Micro-Electro-Mechanical-Systems (MEMS) tuning fork gyroscopes without sacrificing the scale factor. MDPI 2016-07-22 /pmc/articles/PMC4970188/ /pubmed/27455272 http://dx.doi.org/10.3390/s16071146 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Guan, Yanwei
Gao, Shiqiao
Liu, Haipeng
Jin, Lei
Zhang, Yaping
Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
title Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
title_full Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
title_fullStr Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
title_full_unstemmed Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
title_short Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
title_sort vibration sensitivity reduction of micromachined tuning fork gyroscopes through stiffness match method with negative electrostatic spring effect
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970188/
https://www.ncbi.nlm.nih.gov/pubmed/27455272
http://dx.doi.org/10.3390/s16071146
work_keys_str_mv AT guanyanwei vibrationsensitivityreductionofmicromachinedtuningforkgyroscopesthroughstiffnessmatchmethodwithnegativeelectrostaticspringeffect
AT gaoshiqiao vibrationsensitivityreductionofmicromachinedtuningforkgyroscopesthroughstiffnessmatchmethodwithnegativeelectrostaticspringeffect
AT liuhaipeng vibrationsensitivityreductionofmicromachinedtuningforkgyroscopesthroughstiffnessmatchmethodwithnegativeelectrostaticspringeffect
AT jinlei vibrationsensitivityreductionofmicromachinedtuningforkgyroscopesthroughstiffnessmatchmethodwithnegativeelectrostaticspringeffect
AT zhangyaping vibrationsensitivityreductionofmicromachinedtuningforkgyroscopesthroughstiffnessmatchmethodwithnegativeelectrostaticspringeffect