Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

In this paper, a stiffness match method is proposed to reduce the vibration sensitivity of micromachined tuning fork gyroscopes. Taking advantage of the coordinate transformation method, a theoretical model is established to analyze the anti-phase vibration output caused by the stiffness mismatch du...

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Detalles Bibliográficos
Autores principales: Guan, Yanwei, Gao, Shiqiao, Liu, Haipeng, Jin, Lei, Zhang, Yaping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970188/
https://www.ncbi.nlm.nih.gov/pubmed/27455272
http://dx.doi.org/10.3390/s16071146

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970188/
https://www.ncbi.nlm.nih.gov/pubmed/27455272
http://dx.doi.org/10.3390/s16071146

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