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Experimental and simulation-based investigation of He, Ne and Ar irradiation of polymers for ion microscopy
Secondary ion mass spectrometry (SIMS) on the helium ion microscope (HIM) promises higher lateral resolution than on classical SIMS instruments. However, full advantage of this new technique can only be obtained when the interaction of He(+) or Ne(+) primary ions with the sample is fully controlled....
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4979758/ https://www.ncbi.nlm.nih.gov/pubmed/27547629 http://dx.doi.org/10.3762/bjnano.7.104 |