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Experimental and simulation-based investigation of He, Ne and Ar irradiation of polymers for ion microscopy

Secondary ion mass spectrometry (SIMS) on the helium ion microscope (HIM) promises higher lateral resolution than on classical SIMS instruments. However, full advantage of this new technique can only be obtained when the interaction of He(+) or Ne(+) primary ions with the sample is fully controlled....

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Detalles Bibliográficos
Autores principales:	Rzeznik, Lukasz, Fleming, Yves, Wirtz, Tom, Philipp, Patrick
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2016
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4979758/ https://www.ncbi.nlm.nih.gov/pubmed/27547629 http://dx.doi.org/10.3762/bjnano.7.104

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