Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

The development of interfacial coherency stresses in TiN/AlN bilayer and multilayer films was investigated by finite element method (ABAQUS) using the four-node bilinear quadrilateral axisymmetric element CAX4R. The TiN and AlN layers are always in compression and tension at the interface, respectiv...

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Detalles Bibliográficos
Autores principales: Chawla, Vipin, Holec, David, Mayrhofer, Paul H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier Science Pub. Co 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4986319/
https://www.ncbi.nlm.nih.gov/pubmed/27570370
http://dx.doi.org/10.1016/j.commatsci.2011.11.024

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4986319/
https://www.ncbi.nlm.nih.gov/pubmed/27570370
http://dx.doi.org/10.1016/j.commatsci.2011.11.024

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