Cargando…
Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
The development of interfacial coherency stresses in TiN/AlN bilayer and multilayer films was investigated by finite element method (ABAQUS) using the four-node bilinear quadrilateral axisymmetric element CAX4R. The TiN and AlN layers are always in compression and tension at the interface, respectiv...
| Autores principales: | , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier Science Pub. Co
2012
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4986319/ https://www.ncbi.nlm.nih.gov/pubmed/27570370 http://dx.doi.org/10.1016/j.commatsci.2011.11.024 |