Comb-referenced laser distance interferometer for industrial nanotechnology

A prototype laser distance interferometer is demonstrated by incorporating the frequency comb of a femtosecond laser for mass-production of optoelectronic devices such as flat panel displays and solar cell devices. This comb-referenced interferometer uses four different wavelengths simultaneously to...

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Detalles Bibliográficos
Autores principales: Jang, Yoon-Soo, Wang, Guochao, Hyun, Sangwon, Kang, Hyun Jay, Chun, Byung Jae, Kim, Young-Jin, Kim, Seung-Woo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4997355/
https://www.ncbi.nlm.nih.gov/pubmed/27558016
http://dx.doi.org/10.1038/srep31770

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4997355/
https://www.ncbi.nlm.nih.gov/pubmed/27558016
http://dx.doi.org/10.1038/srep31770

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