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Modeling and Experimental Analysis on the Temperature Response of AlN-Film Based SAWRs
The temperature responses of aluminum nitride (AlN) based surface acoustic wave resonator (SAWR) are modeled and tested. The modeling of the electrical performance is based on a modified equivalent circuit model introduced in this work. For SAWR consisting of piezoelectric film and semiconducting su...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5017371/ https://www.ncbi.nlm.nih.gov/pubmed/27483286 http://dx.doi.org/10.3390/s16081205 |