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The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass
Transparent conducting oxide (TCO) coatings with decreased cost and greater process or performance versatility are needed for a variety of optoelectronic applications. Among potential new TCO candidates, doped titanium dioxide is receiving particular interest. In this study, niobium-doped titania bi...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5017507/ https://www.ncbi.nlm.nih.gov/pubmed/27610922 http://dx.doi.org/10.1038/srep32830 |
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author | Nikodemski, Stefan Dameron, Arrelaine A. Perkins, John D. O’Hayre, Ryan P. Ginley, David S. Berry, Joseph J. |
author_facet | Nikodemski, Stefan Dameron, Arrelaine A. Perkins, John D. O’Hayre, Ryan P. Ginley, David S. Berry, Joseph J. |
author_sort | Nikodemski, Stefan |
collection | PubMed |
description | Transparent conducting oxide (TCO) coatings with decreased cost and greater process or performance versatility are needed for a variety of optoelectronic applications. Among potential new TCO candidates, doped titanium dioxide is receiving particular interest. In this study, niobium-doped titania bilayer structures consisting of a nanoscale seed layer (deposited by atomic layer deposition or RF magnetron sputtering) followed by a thick bulk-like layer were grown directly on glass in order to examine the effects of the seed layer processing on the subsequent crystallization and electrical properties of these heterostructures. Observations from Raman spectroscopy suggest that higher oxygen content in the seed layer suppresses the formation of detrimental titania polymorph phases, found in films produced by annealing directly after synthesis without any exposure to oxygen. Furthermore, our results indicate that the generation of excellent Nb:TiO(2) conductors on glass (without breaking vacuum) only occurs within a narrow processing range and that the sequential deposition of oxygen-poor layers on oxygen-rich layers is a critical step towards achieving films with low resistivity. |
format | Online Article Text |
id | pubmed-5017507 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | Nature Publishing Group |
record_format | MEDLINE/PubMed |
spelling | pubmed-50175072016-09-12 The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass Nikodemski, Stefan Dameron, Arrelaine A. Perkins, John D. O’Hayre, Ryan P. Ginley, David S. Berry, Joseph J. Sci Rep Article Transparent conducting oxide (TCO) coatings with decreased cost and greater process or performance versatility are needed for a variety of optoelectronic applications. Among potential new TCO candidates, doped titanium dioxide is receiving particular interest. In this study, niobium-doped titania bilayer structures consisting of a nanoscale seed layer (deposited by atomic layer deposition or RF magnetron sputtering) followed by a thick bulk-like layer were grown directly on glass in order to examine the effects of the seed layer processing on the subsequent crystallization and electrical properties of these heterostructures. Observations from Raman spectroscopy suggest that higher oxygen content in the seed layer suppresses the formation of detrimental titania polymorph phases, found in films produced by annealing directly after synthesis without any exposure to oxygen. Furthermore, our results indicate that the generation of excellent Nb:TiO(2) conductors on glass (without breaking vacuum) only occurs within a narrow processing range and that the sequential deposition of oxygen-poor layers on oxygen-rich layers is a critical step towards achieving films with low resistivity. Nature Publishing Group 2016-09-09 /pmc/articles/PMC5017507/ /pubmed/27610922 http://dx.doi.org/10.1038/srep32830 Text en Copyright © 2016, The Author(s) http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ |
spellingShingle | Article Nikodemski, Stefan Dameron, Arrelaine A. Perkins, John D. O’Hayre, Ryan P. Ginley, David S. Berry, Joseph J. The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass |
title | The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass |
title_full | The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass |
title_fullStr | The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass |
title_full_unstemmed | The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass |
title_short | The Role of Nanoscale Seed Layers on the Enhanced Performance of Niobium doped TiO(2) Thin Films on Glass |
title_sort | role of nanoscale seed layers on the enhanced performance of niobium doped tio(2) thin films on glass |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5017507/ https://www.ncbi.nlm.nih.gov/pubmed/27610922 http://dx.doi.org/10.1038/srep32830 |
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