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Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied...

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Detalles Bibliográficos
Autores principales:	Prencipe, Irene, Dellasega, David, Zani, Alessandro, Rizzo, Daniele, Passoni, Matteo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Taylor & Francis 2015
Materias:	Papers
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5036461/ https://www.ncbi.nlm.nih.gov/pubmed/27877776 http://dx.doi.org/10.1088/1468-6996/16/2/025007

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