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Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges
Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic f...
Autores principales: | Herrera-May, Agustín Leobardo, Soler-Balcazar, Juan Carlos, Vázquez-Leal, Héctor, Martínez-Castillo, Jaime, Vigueras-Zuñiga, Marco Osvaldo, Aguilera-Cortés, Luz Antonio |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038637/ https://www.ncbi.nlm.nih.gov/pubmed/27563912 http://dx.doi.org/10.3390/s16091359 |
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