Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors

High temperature characteristics of langasite surface acoustic wave (SAW) devices coated with an AlN thin film have been investigated in this work. The AlN films were deposited on the prepared SAW devices by mid-frequency magnetron sputtering. The SAW devices coated with AlN films were measured from...

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Detalles Bibliográficos
Autores principales: Shu, Lin, Peng, Bin, Cui, Yilin, Gong, Dongdong, Yang, Zhengbing, Liu, Xingzhao, Zhang, Wanli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038714/
https://www.ncbi.nlm.nih.gov/pubmed/27608027
http://dx.doi.org/10.3390/s16091436

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038714/
https://www.ncbi.nlm.nih.gov/pubmed/27608027
http://dx.doi.org/10.3390/s16091436

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