Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests

This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm(2), thus fitting the 1.8 × 1.8 mm(2...

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Detalles Bibliográficos
Autores principales: Kim, Hyun Chan, Song, Sangho, Kim, Jaehwan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038772/
https://www.ncbi.nlm.nih.gov/pubmed/27649184
http://dx.doi.org/10.3390/s16091499

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038772/
https://www.ncbi.nlm.nih.gov/pubmed/27649184
http://dx.doi.org/10.3390/s16091499

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