Cargando…
Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response
The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behin...
Autores principales: | , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038823/ https://www.ncbi.nlm.nih.gov/pubmed/27657087 http://dx.doi.org/10.3390/s16091553 |
_version_ | 1782455960491524096 |
---|---|
author | Brito, Nuno Ferreira, Carlos Alves, Filipe Cabral, Jorge Gaspar, João Monteiro, João Rocha, Luís |
author_facet | Brito, Nuno Ferreira, Carlos Alves, Filipe Cabral, Jorge Gaspar, João Monteiro, João Rocha, Luís |
author_sort | Brito, Nuno |
collection | PubMed |
description | The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behind when compared to the design and manufacturing competencies developed over the last decades by the IC industry. A complete digital solution for fast testing and characterization of inertial sensors with built-in actuation mechanisms is presented in this paper, with a fast, full-wafer test as a leading ambition. The full electrical approach and flexibility of modern hardware design technologies allow a fast adaptation for other physical domains with minimum effort. The digital system encloses a processor and the tailored signal acquisition, processing, control, and actuation hardware control modules, capable of the structure position and response analysis when subjected to controlled actuation signals in real time. The hardware performance, together with the simplicity of the sequential programming on a processor, results in a flexible and powerful tool to evaluate the newest and fastest control algorithms. The system enables measurement of resonant frequency (Fr), quality factor (Q), and pull-in voltage (Vpi) within 1.5 s with repeatability better than 5 ppt (parts per thousand). A full-wafer with 420 devices under test (DUTs) has been evaluated detecting the faulty devices and providing important design specification feedback to the designers. |
format | Online Article Text |
id | pubmed-5038823 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-50388232016-09-29 Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response Brito, Nuno Ferreira, Carlos Alves, Filipe Cabral, Jorge Gaspar, João Monteiro, João Rocha, Luís Sensors (Basel) Article The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behind when compared to the design and manufacturing competencies developed over the last decades by the IC industry. A complete digital solution for fast testing and characterization of inertial sensors with built-in actuation mechanisms is presented in this paper, with a fast, full-wafer test as a leading ambition. The full electrical approach and flexibility of modern hardware design technologies allow a fast adaptation for other physical domains with minimum effort. The digital system encloses a processor and the tailored signal acquisition, processing, control, and actuation hardware control modules, capable of the structure position and response analysis when subjected to controlled actuation signals in real time. The hardware performance, together with the simplicity of the sequential programming on a processor, results in a flexible and powerful tool to evaluate the newest and fastest control algorithms. The system enables measurement of resonant frequency (Fr), quality factor (Q), and pull-in voltage (Vpi) within 1.5 s with repeatability better than 5 ppt (parts per thousand). A full-wafer with 420 devices under test (DUTs) has been evaluated detecting the faulty devices and providing important design specification feedback to the designers. MDPI 2016-09-21 /pmc/articles/PMC5038823/ /pubmed/27657087 http://dx.doi.org/10.3390/s16091553 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Brito, Nuno Ferreira, Carlos Alves, Filipe Cabral, Jorge Gaspar, João Monteiro, João Rocha, Luís Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response |
title | Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response |
title_full | Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response |
title_fullStr | Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response |
title_full_unstemmed | Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response |
title_short | Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response |
title_sort | digital platform for wafer-level mems testing and characterization using electrical response |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038823/ https://www.ncbi.nlm.nih.gov/pubmed/27657087 http://dx.doi.org/10.3390/s16091553 |
work_keys_str_mv | AT britonuno digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse AT ferreiracarlos digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse AT alvesfilipe digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse AT cabraljorge digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse AT gasparjoao digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse AT monteirojoao digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse AT rochaluis digitalplatformforwaferlevelmemstestingandcharacterizationusingelectricalresponse |