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Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behin...

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Detalles Bibliográficos
Autores principales:	Brito, Nuno, Ferreira, Carlos, Alves, Filipe, Cabral, Jorge, Gaspar, João, Monteiro, João, Rocha, Luís
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5038823/ https://www.ncbi.nlm.nih.gov/pubmed/27657087 http://dx.doi.org/10.3390/s16091553

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