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Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)

Controlled fabrication of single and multiple nanostructures far below the diffraction limit using a method based on laser induced periodic surface structure (LIPSS) is presented. In typical LIPSS, multiple lines with a certain spatial periodicity, but often not well-aligned, were produced. In this...

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Autores principales: He, Xiaolong, Datta, Anurup, Nam, Woongsik, Traverso, Luis M., Xu, Xianfan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5056352/
https://www.ncbi.nlm.nih.gov/pubmed/27721428
http://dx.doi.org/10.1038/srep35035
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author He, Xiaolong
Datta, Anurup
Nam, Woongsik
Traverso, Luis M.
Xu, Xianfan
author_facet He, Xiaolong
Datta, Anurup
Nam, Woongsik
Traverso, Luis M.
Xu, Xianfan
author_sort He, Xiaolong
collection PubMed
description Controlled fabrication of single and multiple nanostructures far below the diffraction limit using a method based on laser induced periodic surface structure (LIPSS) is presented. In typical LIPSS, multiple lines with a certain spatial periodicity, but often not well-aligned, were produced. In this work, well-controlled and aligned nanowires and nanogrooves with widths as small as 40 nm and 60 nm with desired orientation and length are fabricated. Moreover, single nanowire and nanogroove were fabricated based on the same mechanism for forming multiple, periodic structures. Combining numerical modeling and AFM/SEM analyses, it was found these nanostructures were formed through the interference between the incident laser radiation and the surface plasmons, the mechanism for forming LIPSS on a dielectric surface using a high power femtosecond laser. We expect that our method, in particular, the fabrication of single nanowires and nanogrooves could be a promising alternative for fabrication of nanoscale devices due to its simplicity, flexibility, and versatility.
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spelling pubmed-50563522016-10-19 Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS) He, Xiaolong Datta, Anurup Nam, Woongsik Traverso, Luis M. Xu, Xianfan Sci Rep Article Controlled fabrication of single and multiple nanostructures far below the diffraction limit using a method based on laser induced periodic surface structure (LIPSS) is presented. In typical LIPSS, multiple lines with a certain spatial periodicity, but often not well-aligned, were produced. In this work, well-controlled and aligned nanowires and nanogrooves with widths as small as 40 nm and 60 nm with desired orientation and length are fabricated. Moreover, single nanowire and nanogroove were fabricated based on the same mechanism for forming multiple, periodic structures. Combining numerical modeling and AFM/SEM analyses, it was found these nanostructures were formed through the interference between the incident laser radiation and the surface plasmons, the mechanism for forming LIPSS on a dielectric surface using a high power femtosecond laser. We expect that our method, in particular, the fabrication of single nanowires and nanogrooves could be a promising alternative for fabrication of nanoscale devices due to its simplicity, flexibility, and versatility. Nature Publishing Group 2016-10-10 /pmc/articles/PMC5056352/ /pubmed/27721428 http://dx.doi.org/10.1038/srep35035 Text en Copyright © 2016, The Author(s) http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
He, Xiaolong
Datta, Anurup
Nam, Woongsik
Traverso, Luis M.
Xu, Xianfan
Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)
title Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)
title_full Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)
title_fullStr Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)
title_full_unstemmed Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)
title_short Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS)
title_sort sub-diffraction limited writing based on laser induced periodic surface structures (lipss)
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5056352/
https://www.ncbi.nlm.nih.gov/pubmed/27721428
http://dx.doi.org/10.1038/srep35035
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