Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe Tomography

The enhancement of the performance of advanced nitride-based optoelectronic devices requires the fine tuning of their composition, which has to be determined with a high accuracy and at the nanometer scale. For that purpose, we have evaluated and compared energy dispersive X-ray spectroscopy (EDX) i...

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Detalles Bibliográficos
Autores principales: Bonef, Bastien, Lopez-Haro, Miguel, Amichi, Lynda, Beeler, Mark, Grenier, Adeline, Robin, Eric, Jouneau, Pierre-Henri, Mollard, Nicolas, Mouton, Isabelle, Haas, Benedikt, Monroy, Eva, Bougerol, Catherine
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5069209/
https://www.ncbi.nlm.nih.gov/pubmed/27757941
http://dx.doi.org/10.1186/s11671-016-1668-2

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