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A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-ba...

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Detalles Bibliográficos
Autores principales:	Wang, Wei, Chen, Jiapin, Zivkovic, Aleksandar. S., Xie, Huikai
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087399/ https://www.ncbi.nlm.nih.gov/pubmed/27690047 http://dx.doi.org/10.3390/s16101611

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